Deal or Case news
23.06.2026
NautaDutilh assisted Innovation Industries and Invest-NL on their series D investment in Nearfield Industries. The transaction values Nearfield Industries at USD 1.6 billion, marking a major milestone in Nearfield’s development into a global leader in semiconductor metrology and inspection.

This latest round of funding was led by new investor Fidelity Management & Research Company, along with Temasek, Walden Catalyst Ventures, Innovation Industries, M&G Investments, and Invest-NL. Qatar Investment Authority (QIA) participated in this round as a new investor. Other existing investors, TNO Ventures and ING also contributed to this oversubscribed round which represents the largest ever for deep-tech in the Netherlands.

Rounds like this take patient capital and partners committed for the long term. Good to see it come together in the Netherlands.
Sybren de Beurs

The NautaDutilh team further consisted of Joppe Schoute, Rosa Jelsma and Naud van Doorn.

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